Modular Control System for a Magnetic Levitated Stage

Abstract

We developed a magnetic levitated stage system, which allows precise positioning in six
DoFs, with only one mover. It requires control of force in many points. Besides, the number of
controlled points can vary with the travel range. For these reasons, a modular concept for the
control and driving system is required. The paper presents the way in which the modularity is
obtained in terms of control algorithm, embedded computing and driving.